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Commissariat à l’énergie atomique et aux énergies alternatives (CEA-LETI)

Profile
The Commissariat à l’Energie Atomique et aux Energie Alternative (CEA) is french a public research organization. The Laboratory for Electronics and Information Technologies (LETI) within CEA, mainly aims at helping companies to increase their competitiveness through technological innovation and transfer of technical know-how. CEA-LETI has been involved in electronics research for over 30 years. It benefits from 10,000 m² of state-of-the-art clean-rooms and equipment’s that worth more than 200 million €.
CEA-LETI is at the cutting edge of European research in microelectronics, micro and nanotechnologies. It employs 1,700 researchers and registers more than 250 patents per year. It is a key partner for large industrial groups as well as for SMEs, with 350 contracts in progress. CEA-LETI has also led to the creation of 38 start-ups, including for instance SOITEC, the world leader in Silicon-on-Insulator (SOI) substrates.
The MOS 200/300 platform provides 200mm and 300mm CMOS-compatible wafer processing, and can be applied to both semiconductor and microsystem devices. This platform also provides 200mm and 300mm wafer-level processing for 3D integration of components. The MEMS200 platform produces non-CMOS Micro-Electro-Mechanical Systems (MEMS). Together, the two platforms have around 500 process tools and a combined staff of more than 450 people.
 

Expertise
The CEA-Leti has a strong background in the development 3D advanced packaging and materials for bio sensors, microelectrodes and implantable devices. CEA LETI has been successfully cooperating for many years with key leading actors in the medicals devices, like SORIN medical in the field cardiac rhythm therapy (CRT) and implantable devices (ref 1)). As an example, CEA LETI has strongly participated to the win of the Silver “Medical Design Excellence Award” for its DebioJectTM Intra-Dermal micro-needle injection device (ref 2.), fabricated in CEA LETI clean room. CEA LETI has participated and led several project on 3D advanced integration. Specific wafer level biocompatible coatings have been also developed (ref 3.). CEA LETI has an expertise in the bio electrochemistry and surface functionalization. The team has worked in several national ANR projects for neurostimulation for high resolution 2D real time implant (Retine: 2009-2012, ref4), Tissue interface ( in vitro and in vivo) for electrophysiological recording (Neurolink: 2007-2010). The team has participated to the PSPSC collaborative project (Intense, 2012-2018,ref 5) for the development of implantable medical device platform for the neuromodulation. The team was a member of the FP6 project, Diamond based artificial retina (DREAMS: 2007-2010).
Within the INFORMED project, CEA LETI team will leverage its expertise to develop 3D packaging of miniaturized medical devices, support R&D transfer to the industrials partners (ex: IPDIA, Philips, Silex) and characterize new material interface for microelectrodes for efficient recording and stimulation. CEA LETI will bring material science expertise (ex: AlN, high k, ALD biocompatible coating, ref 6) and technologies (TSV, 3D capacitors, interconnects)
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