ESIEE-PARIS is an engineering education institution dedicated to electrical engineering up to the Master level, offering 4 technical domains, Computer science, Embedded Systems, Telecommunications, and Electronics and Microelectronics. It depends on the Chamber of Commerce and Industry of Paris Ile de France (CCI PIdF), France. Research at ESIEE-Paris in the MEMS field is organised in the Laboratory ESYCOM EA 2552 (Electronics, Communication systems and Microsystems). ESIEE-Parisis also a member of the University Paris Est (UPE) and has obtained the Carnot label in 2007 (VITRES). ESIEE-Paris has a large experience in the fabrication of MEMS components with its own clean room facility (~350 m2, extension to 600m² in 2016) fully equipped and entirely dedicated to MEMS. For more than 20 years ESIEE-Paris has developed specific micro-fabrication processes to fabricate MEMS mainly using silicon technology, but also glass or polymers. Today, ESIEE-Paris is involved in large partnerships with national and international research centers and companies. Its main activity is to develop several types of micro-sensors, like high sensitivity pressure sensors, RF MEMS, optical MEMS, sensors and actuators, and bio-chemical sensors.
In collaboration with SME Bodycap, we developed the concept of second skin. This concept is based on the development and integration of very thin sensors to monitoring physical parameters. A specific process has been developed in your clean room facility to fabricate soft sensors like a second skin. With this process we have achieved a very thin piezoelectric sensor (less 10 microns) and electrode encapsulated in polymer material and compatible with CMOS process. This sensor could be used to measure different parameters like cardiac frequency. Furthermore Bodycap and ESIEE-Paris has patented this process and applications.