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SPTS
 
Profile
SPTS Technologies is a manufacturer of etch, deposition and thermal equipment used to process semiconductor wafers, to create a wide range of microelectronic devices. Markets served include MEMS, Advanced Packaging, RF-IC, LEDs and Power Device manufacturing. Technologies offered include silicon Deep Reactive Ion Etch (DRIE), inductively coupled plasma (ICP) etch, HF vapour etch, XeF2 vapour etch, plasma enhanced chemical vapour deposition (PECVD), physical vapour deposition (PVD) and low pressure chemical vapour deposition (LPCVD).
The majority of the company’s products are manufactured in Newport (South Wales), with 2 smaller manufacturing sites based in the USA. The company employs around 500 people worldwide, with ten sales/service offices throughout Europe, North America and Asia.
 
 
Expertise
SPTS was the first equipment manufacturer to offer a commercial DRIE system, in 1994, which allows device manufacturers to etch deep, high aspect ratio features into silicon wafers. This is a key enabling process in the manufacture of Micro-Electro-Mechanical Systems (MEMS), which includes emerging micro devices for medical applications. SPTS is the acknowledged market leader in silicon DRIE for MEMS manufacturing, serving 28 out of the Top 30 MEMS manufacturers with an estimated market share of ~80%. Over the past 20 years, SPTS has continuously improved the process capabilities of their etch systems and maintained technology advantages over competing equipment companies.
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